FFKM Canrez CP65TB11 O-Ring, Size: -013
Material: FFKM Canrez CP65TB11 O-Ring
Size: AS568 -013 O-Ring
Part Number: CP65TB11-OR-013
Canrez® (Canyon Components)
CP65TB11
FFKM (Perfluoroelastomer)
65
Shore A
Semiconductor Material
Color: Translucent Brown
Detailed Description
CP65TB11-OR-013 is a Translucent Brown, 65 Shore A, FFKM (Perfluoroelastomer) O-Ring made from Canrez® (Canyon Components). Canrez® (Canyon Components) CP65TB11 is manufactured with the following features & specifications: Semiconductor Material. CP65TB11-OR-013 is AS568 size -013 O-Ring also referred to as 1.78mm (Cross Sectional Diameter (CS)) x 10.82mm (Inside Diameter (ID)).
Material: FFKM Canrez CP65TB11 O-Ring
Size: AS568 -013, 1.78mm CS X 10.82mm ID (0.070" CS X 0.426" ID)
| Technical Specification | Value |
|---|---|
| Compound Number | CP65TB11 |
| Brand | Canrez® (Canyon Components) |
| Material | FFKM (Perfluoroelastomer) |
| Color | Translucent Brown |
| Durometer | 65 Shore A |
| High Temperature | 300 °C / 572 °F |
| Low Temperature | -20 °C / -4 °F |
| Geometry Specifications | |
| Cross Sectional Geometry | O-Ring |
| Size Standard | AS568 |
| Size | -013 |
| Cross Section (CS) | 1.78 mm / 0.070 in |
| Inside Diameter (ID) | 10.82 mm / 0.426 in |
| Other Specifications | |
Semiconductor Material | |
Canrez® CP65TB11 is a 65 Shore A semitranslucent brown FFKM compound engineered for semiconductor sealing applications that demand strong plasma resistance, broad chemical compatibility, and stable high-temperature performance. With a service temperature range of -20°C to 300°C (-4°F to 572°F), it maintains low compression set and elastic recovery under aggressive thermal and chemical exposure. The formulation is optimized for clean performance in vacuum and plasma environments while remaining a cost-effective option for advanced process tools. CP65TB11 supports consistent sealing integrity in both static and dynamic conditions commonly found in semiconductor manufacturing.
CP65TB11 is widely used across semiconductor processes including RPCVD, PECVD, SACVD, ALD, HDPCVD, CVD, LPCVD, APCVD deposition, plasma etching, ashing, ion implantation, sputtering, PVD metallization, RTP, oxidation, and diffusion. It is also suitable for select chemical processing environments where purity and chemical resistance are critical. This Canrez® formulation provides a practical FFKM solution for high-temperature, plasma-exposed applications. Compare to other popular brands of FFKM materials such as Kalrez® 9100.
Common relevant keywords:
FFKM, Perfluoroelastomer, Canrez, 65 Shore A FFKM, Semiconductor O-rings, Plasma Resistant Seals, High Temperature FFKM, Low Compression Set FFKM, Chemical Resistant O-rings, Vacuum Seals, CVD Seals, PECVD Seals, ALD Seals, Etch Chamber Seals, PVD Seals, Ion Implant Seals, Kalrez 9100 Equivalent, Datasheet, TDS, Test Report, MTR, MSDS, SDS