CP65TB11 Datasheet

Canrez® CP65TB11 is a 65 durometer translucent brown FFKM compound developed for semiconductor O-rings and gaskets requiring superior plasma and chemical resistance. Engineered for high-purity environments, it provides reliable sealing in aggressive plasma and reactive gas conditions while remaining competitively priced compared to other popular brands of FFKM materials. With a service temperature range of -20°C to 300°C (-4°F to 572°F), CP65TB11 maintains elasticity, low compression set, and long-term stability during repeated thermal cycling. Its clean formulation minimizes particle generation, making it ideal for vacuum and process chamber applications.

 

CP65TB11 is designed for advanced semiconductor processes such as CVD, PECVD, LPCVD, HDPCVD, ALD, plasma etching, ion implantation, and PVD metallization. The compound’s durability and purity also make it well-suited for lamp anneal, oxidation, and diffusion operations. This Canrez® formulation offers exceptional plasma resistance, near-universal chemical compatibility, and reliable high-temperature sealing performance for critical semiconductor manufacturing environments.