CP65TB11 Datasheet

Canrez® CP65TB11 is a 65 Shore A semitranslucent brown FFKM compound engineered for semiconductor sealing applications that demand strong plasma resistance, broad chemical compatibility, and stable high-temperature performance. With a service temperature range of -20°C to 300°C (-4°F to 572°F), it maintains low compression set and elastic recovery under aggressive thermal and chemical exposure. The formulation is optimized for clean performance in vacuum and plasma environments while remaining a cost-effective option for advanced process tools. CP65TB11 supports consistent sealing integrity in both static and dynamic conditions commonly found in semiconductor manufacturing.

 

CP65TB11 is widely used across semiconductor processes including RPCVD, PECVD, SACVD, ALD, HDPCVD, CVD, LPCVD, APCVD deposition, plasma etching, ashing, ion implantation, sputtering, PVD metallization, RTP, oxidation, and diffusion. It is also suitable for select chemical processing environments where purity and chemical resistance are critical. This Canrez® formulation provides a practical FFKM solution for high-temperature, plasma-exposed applications. Compare to other popular brands of FFKM materials such as Kalrez® 9100.

 

Common relevant keywords:
FFKM, Perfluoroelastomer, Canrez, 65 Shore A FFKM, Semiconductor O-rings, Plasma Resistant Seals, High Temperature FFKM, Low Compression Set FFKM, Chemical Resistant O-rings, Vacuum Seals, CVD Seals, PECVD Seals, ALD Seals, Etch Chamber Seals, PVD Seals, Ion Implant Seals, Kalrez 9100 Equivalent, Datasheet, TDS, Test Report, MTR, MSDS, SDS