CHLORINE (PLASMA) Chemical compatibility with O-rings, rubbers, & plastics

Chlorine plasma, also referred to as ionized chlorine gas or Cl2 plasma, is a highly reactive form of chlorine used in plasma etching, surface modification, and semiconductor manufacturing processes. In this energized state, chlorine plasma is extremely corrosive and toxic. When evaluating compatibility with O-rings, rubber seals, gaskets, and plastic components in plasma environments, resistance to chemical attack and surface erosion is critical. Specialized rubber materials are often required. Strict containment, ventilation, monitoring, and PPE are essential to ensure safety and maintain reliable sealing performance.

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Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

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