NITROGEN TRIFLUORIDE Chemical compatibility with O-rings, rubbers, & plastics

Nitrogen trifluoride (NF3) is a colorless, non-flammable gas used primarily in the electronics industry for cleaning and etching semiconductor wafers. It is a potent greenhouse gas, and its use is carefully regulated. Nitrogen trifluoride is also used in the production of certain chemicals and as an oxidizing agent. Proper handling and storage of nitrogen trifluoride are essential to prevent exposure and environmental impact. Safety measures should include the use of personal protective equipment, proper ventilation, and adherence to strict regulatory guidelines. Regular monitoring and maintenance of systems using nitrogen trifluoride ensure optimal performance and safety, making it a critical component in semiconductor manufacturing while mitigating its environmental footprint.

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