Semiconductor & Solar Grade O-ring Materials

Materials for semiconductor and solar seals must balance chemical resistance, purity, and outgassing performance. The most widely used materials include:

• FFKM (Perfluoroelastomer) for extreme chemical and thermal resistance during plasma processing, acid cleaning, and high-vacuum operations.
• FKM (Fluorocarbon) for applications requiring high temperature and solvent resistance where FFKM performance is not essential.
• EPDM for ultra-pure water and ozone exposure in cleaning systems.
• Silicone and fluorosilicone for cryogenic sealing and flexible interfaces.
• Canyon Components also offers PTFE and plasma-resistant coatings that extend seal life in high-energy environments. Each compound is formulated to reduce ion contamination, meet outgassing limits, and maintain surface cleanliness compatible with ISO Class 1 and Class 10 cleanroom operations. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Plasma environments expose seals to ionized gases, high energy radiation, and temperatures that can exceed 400°F. Standard elastomers quickly lose mechanical strength, releasing particles or metallic ions that contaminate wafer surfaces. Canyon Components supplies plasma-resistant FFKM compounds such as Canrez® CP70TA11 and Chemraz® material, specifically designed to resist etch degradation and maintain structural integrity in these conditions. We also provide fluorocarbon and parylene coatings that protect seal surfaces from erosion and reduce friction. Our plasma-resistant materials are tested for fluorine plasma durability and low metal ion generation, ensuring that seals remain intact and particle-free over extended production cycles. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Semiconductor processes use strong acids, bases, and solvents such as sulfuric acid, hydrogen peroxide, hydrofluoric acid, and isopropanol. These chemicals can cause swelling, softening, or cracking in incompatible materials, leading to leakage and contamination. Canyon Components provides FFKM compounds like Canrez® and Kalrez® that offer near-universal chemical compatibility, maintaining mechanical stability across the full range of process chemistries. We also supply fluoroelastomer and EPDM blends that are optimized for resistance to specific fluids used in wet benches, gas delivery systems, and chemical mechanical polishing (CMP) equipment. Each compound is validated for minimal extractables and ionic contamination to maintain the purity required for wafer-level manufacturing. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

FFKM (perfluoroelastomer) materials provide the broadest resistance to both chemicals and high temperatures, combining the chemical inertness of PTFE with the elasticity of rubber. These materials can endure continuous exposure to temperatures exceeding 600°F and remain stable in nearly all reactive gas and chemical environments. Canyon Components’ Canrez® and Kalrez® compounds are engineered for low outgassing, minimal particle generation, and long service life under aggressive plasma conditions. They maintain sealing integrity during rapid temperature cycling and repeated vacuum-to-atmosphere transitions, ensuring consistent performance in vacuum chambers and process reactors. Their low compression set and surface stability also reduce downtime related to maintenance and part replacement. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Contamination control is fundamental to semiconductor and solar production. All Canyon Components sealing products for these industries are manufactured, cleaned, and packaged in ISO Class 7 or better cleanroom environments. Each part undergoes multiple stages of washing, particle inspection, and vacuum packaging to eliminate trace contaminants and volatiles. Materials are compounded without fillers or additives that could release ionic residues. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Yes. Many semiconductor and solar processes operate in vacuum chambers or at cryogenic temperatures, requiring seals that maintain elasticity across extreme pressure and temperature differentials. Canyon Components provides low-outgassing FFKM and silicone materials that perform consistently under vacuum without releasing volatile compounds. These materials retain flexibility at sub-zero temperatures and provide reliable compression recovery after exposure to liquid nitrogen or cryogenic gases. For systems that combine vacuum and plasma exposure, we recommend plasma-treated FFKM compounds that balance sealing force, low permeability, and erosion resistance, ensuring performance in both static and dynamic sealing applications. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Absolutely. Semiconductor and solar systems often require non-standard seal geometries for flanges, valves, or custom reactor designs. Canyon Components offers precision-molded, lathe-cut, and custom-profile seals that meet the exact gland dimensions and tolerances of specialized equipment. Our engineers can reproduce or improve legacy designs using 3D modeling, reverse engineering, and rapid prototyping, ensuring a perfect fit and improved service life. We also provide bonded metal-to-elastomer parts and spring-energized PTFE seals for applications that involve high pressure or movement. Custom parts are available in both standard and cleanroom-certified packaging to meet installation and traceability requirements. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

While both industries demand cleanliness and precision, their operating conditions vary. Semiconductor fabrication involves aggressive gases, plasma, and corrosive chemicals that require high-purity FFKM seals. Solar module production, on the other hand, often involves UV curing, laminating adhesives, and thermal cycling during panel assembly. For solar applications, Canyon Components provides silicone, FKM, and EPDM seals that maintain elasticity and environmental resistance under long-term sunlight and weather exposure. We also offer thermal management and adhesive integration options, allowing seals to double as insulation or vibration-damping elements in solar energy systems. Our experience across both sectors ensures that customers receive materials optimized for their specific process and environmental conditions. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!

Canyon Components delivers more than standard sealing products. We combine deep materials expertise, precision manufacturing, and strict contamination control to provide industry-leading reliability in every component. Our engineering team collaborates with semiconductor and solar manufacturers to develop materials that reduce downtime, increase equipment life, and maintain process purity. We offer extensive documentation, including Certificates of Conformance, lot traceability, and SEMI-standard cleanliness reports, for full quality assurance. Whether supplying plasma-resistant O-rings for etch chambers, chemically inert seals for CMP tools, or durable gaskets for solar panel laminators, Canyon Components ensures consistent performance, rapid response, and technical excellence across every project. If you have any questions or require design assistance, feel free to reach out to the Canyon Components engineering team!