Semiconductor & Solar Grade O-ring Materials

What are Semiconductor and Solar Grade Materials?

• Semiconductor and solar grade materials are substances, components, or equipment that are specially designed and manufactured to meet the strict purity and precision requirements of the semiconductor and solar industries. These materials play a critical role in the performance and reliability of semiconductor devices and solar panels.

Common Considerations

• Sealing Applications: O-rings, gaskets, & custom molded parts are used in a variety of sealing applications within semiconductor processing equipment. O-rings, gaskets, & custom molded parts can be found in vacuum chambers, wafer processing equipment, gas distribution systems, chemical handling systems, and many other areas where a reliable seal is required.

• Material Selection: The choice of O-ring, gasket, & custom molded part material is crucial in semiconductor processing due to the unique challenges posed by the environment. O-ring, gasket, & custom molded part materials with excellent chemical resistance, low outgassing properties, and high purity are preferred. Common materials used include perfluoroelastomers (e.g., Canrez, Kalrez), fluorocarbon elastomers (e.g., Viton), and certain types of silicone. All of these materials can be used to produce O-rings, gaskets, & custom molded parts.

• Vacuum Compatibility: Semiconductor processing often involves vacuum environments, and O-rings, gaskets, & custom molded parts must be compatible with such conditions. Special attention is given to the outgassing characteristics of the O-ring, gasket, & custom molded part material to minimize contamination and maintain the vacuum integrity.

• ​Chemical Resistance: Semiconductor processing involves the use of various chemicals, gases, and solvents. O-rings, gaskets, & custom molded parts must be resistant to these substances to ensure they do not degrade or react with the process media, which could lead to leaks or contamination.

Further Considerations

• Temperature and Pressure: Semiconductor processes may involve extreme temperatures and pressures. O-rings, gaskets, & custom molded parts must be capable of withstanding these conditions without losing their sealing properties or undergoing deformation.

• Size and Tolerance Control: Semiconductor equipment often requires precision-engineered components, and O-rings, gaskets, & custom molded parts are no exception. Tight size tolerances are crucial to ensure a proper fit and seal. Custom-sized O-rings, gaskets, & custom molded parts may be required for specific applications.

• Installation and Maintenance: Proper installation and regular maintenance of O-rings, gaskets, & custom molded parts are important for their optimal performance and longevity. Regular inspections and replacements of these O-rings, gaskets, & custom molded parts are necessary to prevent leaks and maintain equipment reliability.

• Contamination Control: Semiconductor processes demand high levels of cleanliness and contamination control. O-rings, gaskets, & custom molded parts should be designed and manufactured to minimize particulate generation and shedding, preventing contamination of the process materials or equipment.