Phosphorous Oxychloride (Phosphoryl Chloride, POCl₃) Rubber O-Rings & Gasket Compatibility

Phosphorous oxychloride, commonly abbreviated as POCl3, is a highly reactive inorganic compound that appears as a colorless to pale yellow fuming liquid with a sharp, irritating odor. It is widely used in chemical manufacturing as a key intermediate in the production of phosphate esters, which are incorporated into flame retardants, plasticizers, and certain hydraulic fluids. Its strong chlorinating and phosphorylating properties make it valuable in controlled industrial synthesis. In addition to its role in specialty chemical production, POCl3 is extensively used in the semiconductor industry, particularly in diffusion processes for doping silicon wafers. Its ability to introduce phosphorus into silicon substrates makes it an important reagent in microelectronics fabrication and advanced materials processing. Because phosphorous oxychloride reacts vigorously with moisture and releases corrosive byproducts, it presents significant health and safety risks. Contact can cause severe chemical burns, while inhalation of vapors may result in serious respiratory injury and systemic toxicity. Safe handling requires chemical resistant gloves, protective eyewear, face shields, and properly designed ventilation or fume extraction systems. Storage must be in tightly sealed, corrosion resistant containers kept away from water, strong bases, and reducing agents. In the event of a spill, immediate containment, neutralization, and controlled cleanup are critical to prevent environmental contamination and exposure. Strict adherence to safety procedures is essential when working with POCl3.

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