CP70TA11 Datasheet

Canrez® CP70TA11 is a 70 durometer translucent amber FFKM compound developed for O-rings and gaskets used in high-purity semiconductor, plasma, laser, and medical environments. Engineered for ultra-clean performance, it offers exceptional plasma resistance, low particle generation, and minimal etch rate to ensure process integrity in critical manufacturing systems. With near-universal chemical resistance and outstanding thermal stability, CP70TA11 performs reliably across a service range of -15°C to 280°C (5°F to 536°F). Its purity and stability make it ideal for maintaining vacuum integrity and reducing contamination in sensitive process chambers.

 

CP70TA11 is designed for both dry and wet semiconductor processes, including CVD, PECVD, LPCVD, SACVD, HDPCVD, plasma etching, wafer cleaning, CMP, oxidation, lithography, and RTP. It also excels in laser and medical applications requiring ultra-high purity and chemical resilience. This Canrez® formulation provides superior plasma resistance, clean performance, and long-term reliability for advanced high-temperature sealing environments. Compare to other popular brands of FFKM materials such as Kalrez® 9100, 8085, and 6375.