CP70TA11 Datasheet

Canrez® CP70TA11 is a 70 Shore A translucent amber FFKM compound engineered for high-purity semiconductor manufacturing, plasma processing, laser systems, and advanced medical applications. Designed with a nano-PTFE–filled formulation, it delivers ultra-high purity, low etch rate, and minimal particle generation while maintaining near-universal chemical resistance. With a service temperature range of -15°C to 280°C (5°F to 536°F), CP70TA11 provides stable sealing performance in aggressive thermal, chemical, and plasma environments. Its strong plasma resistance and low compression set support long service life in both static and dynamic sealing applications.

 

CP70TA11 is widely used in dry and wet semiconductor processes including CVD, PECVD, LPCVD, SACVD, RPCVD, HDPCVD, APCVD, PVD, plasma etching, ashing, CMP, oxidation, RTP, wafer cleaning, lamp anneal, and EPI + SiGe processes. It is also well suited for high-purity medical, laser, and plasma-based equipment where contamination control is critical. This Canrez® formulation offers a specialized FFKM solution for advanced process environments requiring exceptional cleanliness and durability. Compare to other popular brands of FFKM materials such as Kalrez® 9100, 8085, and 6375.

 

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