CP90WH20 Datasheet

Canrez® CP90WH20 is a 90 Shore A white, high-purity FFKM compound engineered specifically for semiconductor manufacturing and plasma process environments. It provides near-universal chemical resistance and outstanding stability in both static and dynamic sealing applications exposed to aggressive plasma, vacuum, and diffusion conditions. Designed for clean, contamination-free performance, CP90WH20 offers high durometer strength, resistance to explosive decompression, and long-term durability under high-temperature operation. With a service temperature range of -30°C to 240°C (-22°F to 464°F), it delivers reliable sealing integrity across a wide range of semiconductor processing conditions.

 

CP90WH20 is ideal for use in semiconductor dry and wet processes including ashing, etching, polishing, PVD, CVD, PECVD, LPCVD, SACVD, HDPCVD, and oxidation, as well as wafer cleaning, lithography, lamp anneal, and EPI + SiGe applications. Its purity and mechanical strength make it suitable for both static chamber seals and dynamic motion components. This Canrez® formulation combines plasma resistance, high purity, and mechanical resilience to provide consistent, clean sealing performance in advanced semiconductor manufacturing environments.