CP90WH20 Datasheet

Canrez® CP90WH20 is a 90 Shore A white, carbon-black-free FFKM compound engineered specifically for high-purity semiconductor manufacturing environments. It offers near-universal chemical resistance combined with strong mechanical integrity and high durometer strength, making it suitable for both static and dynamic sealing in aggressive plasma, vacuum, and diffusion processes. With a service temperature range of -30°C to 240°C (-22°F to 464°F), CP90WH20 maintains sealing stability under repeated thermal cycling and exposure to reactive process chemistries. Its high-purity formulation supports low contamination risk while providing resistance to explosive decompression in demanding semiconductor tool applications.

 

CP90WH20 is commonly used in semiconductor dry and wet processes including plasma etching, ashing, PVD, CVD, PECVD, LPCVD, HDPCVD, oxidation, RTP, wafer cleaning, lamp anneal, CMP, lithography, and EPI + SiGe operations. The combination of high durometer strength, chemical durability, and cleanliness makes it well suited for chamber seals, valve seals, and motion-critical components. This Canrez® formulation delivers reliable performance for advanced semiconductor processes where purity, durability, and dimensional stability are critical.

 

Common relevant keywords:
FFKM, Perfluoroelastomer, Canrez, White FFKM, Carbon-Black-Free FFKM, 90 Shore A FFKM, High Durometer FFKM, Semiconductor O-rings, Plasma Resistant Seals, High Purity Elastomers, Vacuum Seals, CVD Seals, PECVD Seals, LPCVD Seals, HDPCVD Seals, Etch Chamber Seals, PVD Seals, CMP Seals, Lithography Seals, Explosion Decompression Resistant Seals, Datasheet, TDS, Test Report, MTR, MSDS, SDS