Chemraz® 513 Datasheet

Greene Tweed’s Chemraz® 513 is an 80 Shore A white perfluoroelastomer (FFKM) compound developed as a universal material for semiconductor dry processing applications requiring reliable sealing and minimal contamination. With a service temperature range of -30°C to 210°C (-22°F to 410°F), Chemraz® 513 offers dependable performance in static plasma, photolithography, and diffusion processes where high sealing loads are not applied. Its excellent plasma resistance, strong physical properties, and low extractable content make it well-suited for cleanroom and high-vacuum environments. The material’s balanced hardness also allows tolerance for minor surface inconsistencies in sealing hardware.

 

Chemraz® 513 is commonly used for door and lid seals, slit valves, gas inlet seals, window seals, KF fittings, and isolator valve seals. It performs effectively in semiconductor process applications such as CVD, PECVD, PVD, sputtering, plasma etching, ashing, ion implantation, and rapid thermal processing (RTP). This perfluoroelastomer formulation combines purity, durability, and broad chemical resistance for reliable sealing in plasma and vacuum systems. Canyon Components offers equivalent FFKM materials that match or exceed the performance of Chemraz® 513 for semiconductor and plasma processing applications.