Chemraz® 520 Datasheet

Greene Tweed’s Chemraz® 520 is a 90 Shore A white perfluoroelastomer (FFKM) compound formulated for semiconductor dry processing applications that demand high sealing reliability and minimal contamination. With a service temperature range of -30°C to 240°C (-22°F to 464°F), it provides exceptional performance in both static and dynamic plasma environments, diffusion systems, and photolithography processes. Its high hardness allows it to withstand greater sealing loads, making it ideal for demanding process chambers and vacuum sealing conditions. Chemraz® 520 combines excellent plasma resistance, strong mechanical properties, and low extractable content for stable, clean sealing performance.

This material is widely used for door seals, slit valves, and isolator valve seals in semiconductor tools. It performs effectively in advanced process applications including CVD, PECVD, PVD, RPCVD, HDPCVD, and APCVD, as well as plasma etch, oxidation, diffusion, ashing, ion implant, and rapid thermal processing (RTP). Its smooth surface finish compatibility (10 µin Ra and below) ensures optimal sealing in precision hardware. Chemraz® 520 offers durability, cleanliness, and temperature resilience for modern plasma and vacuum environments. Canyon Components offers equivalent FFKM materials that match or exceed the performance of Chemraz® 520 for semiconductor and high-purity applications.