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CP90WH20-OR-5X109
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CS

0.197 in

(5.00 mm)

ID

4.291 in

(109.00 mm)

ORing cut reference

FFKM Canrez CP90WH20 O-Ring, Size: 5X109

Material: FFKM Canrez CP90WH20 O-Ring

Size: Metric 5X109 O-Ring

Part Number: CP90WH20-OR-5X109

CanRez® (Canyon Components)

CP90WH20

FFKM (Perfluoroelastomer)

90

Shore A

Low Temperature Material

Color: White

Detailed Description

CP90WH20-OR-5X109 is a White, 90 Shore A, FFKM (Perfluoroelastomer) O-Ring made from CanRez® (Canyon Components). CanRez® (Canyon Components) CP90WH20 is manufactured with the following features & specifications: Low Temperature Material. CP90WH20-OR-5X109 is Metric size 5X109 O-Ring also referred to as 5mm (Cross Sectional Diameter (CS)) x 109mm (Inside Diameter (ID)).


Material: FFKM Canrez CP90WH20 O-Ring


Size: Metric 5X109, 5.00mm CS X 109.00mm ID (0.197" CS X 4.291" ID)

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Technical SpecificationValue
Compound NumberCP90WH20
BrandCanRez® (Canyon Components)
MaterialFFKM (Perfluoroelastomer)
ColorWhite
Durometer90 Shore A
High Temperature240 °C / 464 °F
Low Temperature-30 °C / -22 °F
Geometry Specifications
Cross Sectional GeometryO-Ring
Size StandardMetric
Size5X109
Cross Section (CS)5.00 mm / 0.197 in
Inside Diameter (ID)109.00 mm / 4.291 in
ORing cut reference
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Canrez® CP90WH20 is a 90 Shore A white, carbon-black-free FFKM compound engineered specifically for high-purity semiconductor manufacturing environments. It offers near-universal chemical resistance combined with strong mechanical integrity and high durometer strength, making it suitable for both static and dynamic sealing in aggressive plasma, vacuum, and diffusion processes. With a service temperature range of -30°C to 240°C (-22°F to 464°F), CP90WH20 maintains sealing stability under repeated thermal cycling and exposure to reactive process chemistries. Its high-purity formulation supports low contamination risk while providing resistance to explosive decompression in demanding semiconductor tool applications.

 

CP90WH20 is commonly used in semiconductor dry and wet processes including plasma etching, ashing, PVD, CVD, PECVD, LPCVD, HDPCVD, oxidation, RTP, wafer cleaning, lamp anneal, CMP, lithography, and EPI + SiGe operations. The combination of high durometer strength, chemical durability, and cleanliness makes it well suited for chamber seals, valve seals, and motion-critical components. This Canrez® formulation delivers reliable performance for advanced semiconductor processes where purity, durability, and dimensional stability are critical.

 

Common relevant keywords:
FFKM, Perfluoroelastomer, Canrez, White FFKM, Carbon-Black-Free FFKM, 90 Shore A FFKM, High Durometer FFKM, Semiconductor O-rings, Plasma Resistant Seals, High Purity Elastomers, Vacuum Seals, CVD Seals, PECVD Seals, LPCVD Seals, HDPCVD Seals, Etch Chamber Seals, PVD Seals, CMP Seals, Lithography Seals, Explosion Decompression Resistant Seals, Datasheet, TDS, Test Report, MTR, MSDS, SDS