Image shown is representative and may differ from the actual product in size, proportions, and color shade
3.500 in
(88.90 mm)
7.500 in
(190.50 mm)
4
0.750 in
(19.05 mm)
6.000 in
(152.40 mm)
1/2"
FFKM Chemraz 520 Full Face Gasket, Size: 150#-3"-FF-1/2"
Material: FFKM Chemraz 520 Full Face Gasket
Size: 150#-3"-FF-1/2" Full Face Gasket
Part Number: GPC520-150#-3"-FF-1/2"
Chemraz® (Greene Tweed)
520
FFKM (Perfluoroelastomer)
90
Shore A
Color: White
Detailed Description
GPC520-150#-3"-FF-1/2" is a White, 90 Shore A, FFKM (Perfluoroelastomer) Full Face Gasket made from Chemraz® (Greene Tweed). It is a 90 durometer FFKM (Perfluoroelastomer). [ GPC520-150#-3"-FF-1/2" is a size 3, 150#-FF ASME Full Face Gasket. Material: 90 Durometer FFKM Chemraz 520 Full Face Gasket Size: 150#-3"-FF-1/2", 3 Pipe Size X 88.9mm ID X 190.5mm OD X 4 Bolt Qty X 19.050mm Bolt Dia. X 152.400mm Bolt Circle X 1/2" Thickness
| Technical Specification | Value |
|---|---|
| Compound Number | GPC520 |
| Brand | Chemraz® (Greene Tweed) |
| Material | FFKM (Perfluoroelastomer) |
| Color | White |
| Durometer | 90 Shore A Hardness |
| High Temperature | 240 °C / 464 °F |
| Low Temperature | -30 °C / -22 °F |
| Geometry Specifications | |
| Type | Full Face Gasket |
| Size | 150#-3"-FF-1/2" |
| Pipe Size | 3 |
| ID | 88.90 mm / 3.500 in |
| OD | 190.50 mm / 7.500 in |
| Bolt Qty | 4 |
| Bolt Dia. | 19.05 mm / 0.750 in |
| Bolt Circle | 152.40 mm / 6.000 in |
| Thickness | 1/2" |
Greene Tweed’s Chemraz® 520 is a 90 Shore A white perfluoroelastomer (FFKM) compound formulated for semiconductor dry processing applications that demand high sealing reliability and minimal contamination. With a service temperature range of -30°C to 240°C (-22°F to 464°F), it delivers dependable performance in static and dynamic plasma environments, diffusion systems, and photolithography processes. Its higher durometer allows it to withstand elevated sealing loads, making it well suited for demanding process chambers and vacuum sealing conditions. The compound combines strong plasma resistance, robust mechanical properties, and low extractables for stable, clean sealing performance in high-purity environments.
Chemraz® 520 is widely used for door seals, slit valves, and isolator valve seals in semiconductor tools. It performs effectively across advanced process applications including CVD, PECVD, PVD, RPCVD, HDPCVD, APCVD, plasma etch, oxidation, diffusion, ashing, ion implantation, and rapid thermal processing (RTP). Compatibility with smooth hardware surface finishes down to 10 µin Ra supports reliable sealing in precision equipment. Canyon Components offers equivalent FFKM materials designed to meet similar plasma resistance, purity, and temperature performance requirements for semiconductor and high-purity applications.
Common relevant keywords:
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