Image shown is representative and may differ from the actual product in size, proportions, and color shade
2.380 in
(60.45 mm)
6.000 in
(152.40 mm)
4
0.750 in
(19.05 mm)
4.750 in
(120.65 mm)
1/32"
FFKM Kalrez 9100 Full Face Gasket, Size: 150#-2"-FF-1/32"
Material: FFKM Kalrez 9100 Full Face Gasket
Size: 150#-2"-FF-1/32" Full Face Gasket
Part Number: KP9100-150#-2"-FF-1/32"
Kalrez® (Dupont)
9100
FFKM (Perfluoroelastomer)
70
Shore A
Semiconductor Material
Color: Translucent Amber
Detailed Description
KP9100-150#-2"-FF-1/32" is a Translucent Amber, 70 Shore A, FFKM (Perfluoroelastomer) Full Face Gasket made from Kalrez® (Dupont). It is a 70 durometer FFKM (Perfluoroelastomer). [Kalrez® (Dupont) 9100 is manufactured with the following features & specifications: Semiconductor Material. KP9100-150#-2"-FF-1/32" is a size 2, 150#-FF ASME Full Face Gasket. Material: 70 Durometer FFKM Kalrez 9100 Full Face Gasket Size: 150#-2"-FF-1/32", 2 Pipe Size X 60.45mm ID X 152.4mm OD X 4 Bolt Qty X 19.050mm Bolt Dia. X 120.650mm Bolt Circle X 1/32" Thickness
| Technical Specification | Value |
|---|---|
| Compound Number | KP9100 |
| Brand | Kalrez® (Dupont) |
| Material | FFKM (Perfluoroelastomer) |
| Color | Translucent Amber |
| Durometer | 70 Shore A Hardness |
| High Temperature | 300 °C / 572 °F |
| Low Temperature | -12 °C / 10 °F |
| Geometry Specifications | |
| Type | Full Face Gasket |
| Size | 150#-2"-FF-1/32" |
| Pipe Size | 2 |
| ID | 60.45 mm / 2.380 in |
| OD | 152.40 mm / 6.000 in |
| Bolt Qty | 4 |
| Bolt Dia. | 19.05 mm / 0.750 in |
| Bolt Circle | 120.65 mm / 4.750 in |
| Thickness | 1/32" |
| Other Specifications | |
Semiconductor Material | |
DuPont™ Kalrez® 9100 (KP9100) is a 70 Shore A translucent amber perfluoroelastomer (FFKM) specifically engineered for advanced semiconductor plasma applications where ultra-low particle generation and minimal erosion are critical to process yield. Designed for PECVD, ALD, HDPCVD, and conductor etch environments, Kalrez® 9100 delivers excellent resistance to oxygen- and fluorine-based plasmas while maintaining very low outgassing and low metallic ion content. With a maximum recommended service temperature of 300°C (572°F), it provides strong thermal stability, good mechanical strength, and reliable elastic recovery in harsh dry process chemistries. Its non–carbon black, polymeric filler formulation significantly reduces the risk of particle contamination compared to traditional filled FFKM materials.
Kalrez® 9100 is commonly used in O-rings and gaskets for gas inlet and orifice seals, chamber lid seals, isolation valves, slit valve doors, and select bonded gate valve applications in semiconductor process tools. It has demonstrated extended preventive maintenance intervals, reduced erosion, and longer seal life in real-world fab environments operating high-power NF₃ plasma cleaning cycles. This material is selected when process consistency, low particle generation, and long-term seal durability directly impact wafer yield. Canyon Components offers equivalent translucent, low-etch, low-particle FFKM materials engineered for semiconductor plasma and deposition applications with similar thermal and contamination control requirements.
Common relevant keywords:
Kalrez 9100, KP9100, translucent amber FFKM, semiconductor plasma O-rings, low particle generation seals, PECVD sealing materials, ALD chamber elastomers, HDPCVD gate valve seals, conductor etch FFKM gaskets, fluorine plasma resistant elastomers, low erosion perfluoroelastomer, semiconductor vacuum sealing solutions, Kalrez 9100 alternative, Datasheet, TDS, Test Report, MTR, MSDS, SDS, Kalrez 9100 O-rings, Kalrez 9100 FFKM seals, Kalrez 9100 gasket material, Kalrez 9100 perfluoroelastomer O-rings, Kalrez 9100 low compression set gasket, Kalrez 9100 FFKM compound
