CP60TA11 Datasheet

Canrez® CP60TA11 is a 60 Shore A semitranslucent amber FFKM compound engineered for high-purity semiconductor sealing applications where chemical resistance and thermal stability are critical. It provides near-universal chemical resistance and reliable performance across a wide service temperature range of -15°C to 280°C (5°F to 536°F), maintaining low compression set and elasticity under aggressive process conditions. The low durometer supports effective sealing under lower clamp loads, while the formulation is optimized for clean performance in plasma and vacuum environments. CP60TA11 is well suited for advanced semiconductor processes that demand consistent sealing integrity and long service life.

 

CP60TA11 is commonly used in RPCVD, PECVD, SACVD, HDPCVD, CVD, LPCVD, and APCVD deposition processes, as well as plasma etching, ashing, ion implantation, sputtering, PVD metallization, RTP, oxidation, and diffusion systems. It is also selected for chemical processing, medical, and laser applications where purity and chemical compatibility are essential. This Canrez® formulation offers a practical, cost-effective FFKM option for demanding semiconductor and high-technology environments.

 

Common relevant keywords:
FFKM, Perfluoroelastomer, Canrez, Translucent FFKM, Semiconductor O-rings, Plasma Resistant Seals, High Purity FFKM, Low Durometer FFKM, Chemical Resistant O-rings, High Temperature O-rings, CVD Seals, PECVD Seals, Etch Chamber Seals, Vacuum Seals, Medical Grade FFKM, Laser Equipment Seals, Industrial O-rings, Datasheet, TDS, Test Report, MTR, MSDS, SDS