KP8900 Datasheet
Kalrez, KP8900, FFKM, Black, SEMICON, HT, 75A
DuPont™ Kalrez® 8900 (KP8900) is a 75 Shore A black perfluoroelastomer (FFKM) engineered for high-temperature semiconductor thermal processes including oxidation, diffusion, ALD, and LPCVD. Designed for sustained operation up to 325°C (617°F), it delivers outstanding thermal stability, very low outgassing, and excellent compression set resistance, helping maintain seal force and dimensional integrity during extended high-temperature cycles. Kalrez® 8900 exhibits strong mechanical properties and excellent retention of physical characteristics at elevated temperatures, making it suitable for both static and dynamic sealing locations. Its resistance to fluorine gas and low moisture content support consistent process performance in contamination-sensitive environments, with ultrapure post-cleaning and packaging standard for cleanroom use.
Kalrez® 8900 is commonly used for O-rings and gaskets in quartz tube seals, plenum seals, chamber seals, fittings, and centering ring seals within semiconductor furnaces and process chambers. It is frequently selected in fabs where low outgassing and long service life directly impact wafer yield and preventive maintenance intervals, particularly in aggressive thermal and cleaning chemistries. This material has demonstrated improved durability and reduced degradation compared to other perfluoroelastomers in real-world semiconductor applications. Canyon Components offers equivalent high-temperature, low-outgassing FFKM materials designed to meet similar performance requirements for semiconductor thermal processing and vacuum sealing applications.
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