
FFKM for Vacuum and Low Outgassing
Vacuum systems and ultra-clean environments require sealing materials that minimize outgassing, permeation, and contamination while maintaining reliable sealing performance under low pressure conditions. FFKM (perfluoroelastomer) O-rings, gaskets, custom parts, and tubes are widely used in high vacuum and ultra-high vacuum (UHV) applications due to their exceptional chemical stability, low volatility, and resistance to thermal degradation.
In vacuum environments, even small amounts of material outgassing can compromise system performance, contaminate sensitive processes, or reduce yield. Canrez® FFKM vacuum-grade compounds from Canyon Components are engineered to provide low outgassing, low extractables, and excellent thermal stability, making them ideal for demanding applications such as semiconductor processing, analytical instrumentation, aerospace systems, and high-purity manufacturing.
Compared to alternatives such as Kalrez®, Chemraz®, Simriz®, and Parofluor®, Canrez® FFKM offers a strong balance of performance, availability, and cost efficiency, helping customers maintain system cleanliness while reducing lead times and overall cost. Canyon Components works closely with customers to ensure proper compound selection, seal design, and material validation for vacuum and low outgassing applications.
Common names include: FFKM, Perfluoroelastomer, Perfluorinated Rubber. Trade names: Canrez®, Kalrez®, Chemraz®, Simriz®, Parofluor®.

FFKM Materials Available for Vacuum and Low Outgassing
This table shows many of our standard materials and links out to our O-ring store. Get in touch with us if you need a custom gasket, custom molded part, or non-standard geometry!

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Features of Vacuum & Low Outgassing FFKM O-Rings, Gaskets, & Custom Parts
- Canrez® FFKM O-rings, gaskets, and custom parts provide low outgassing and low extractables, supporting high vacuum and ultra-high vacuum (UHV) environments
- FFKM perfluoroelastomer materials exhibit excellent chemical stability, minimizing contamination in sensitive systems
- FFKM O-rings, gaskets, and custom parts offer low permeability to gases, improving vacuum retention and system performance
- Canrez® FFKM materials provide excellent thermal stability, enabling bake-out processes commonly used in vacuum systems
- FFKM O-rings, gaskets, and custom parts maintain low compression set, ensuring consistent sealing under vacuum conditions
- Available in standard O-ring sizes, large diameter seals, and custom molded geometries, including precision components for vacuum systems
- FFKM O-rings, gaskets, and custom parts are compatible with aggressive cleaning agents and process chemicals used in high-purity environments
- Canrez® FFKM offers strong availability and competitive pricing compared to Kalrez®, Chemraz®, Simriz®, and Parofluor® vacuum-grade materials
Limitations of Vacuum & Low Outgassing FFKM O-Rings, Gaskets, & Custom Parts
- FFKM O-rings, gaskets, and custom parts have a higher upfront cost compared to standard elastomers or some PTFE-based solutions
- Ultra-high vacuum applications may require additional validation, including outgassing testing and bake-out procedures
- In extreme UHV environments, metal seals or specialized PTFE-based seals may be required for the lowest possible outgassing levels
- Proper installation and surface preparation are critical to ensure optimal sealing and vacuum performance
- Material selection must consider temperature, pressure, and chemical exposure to ensure optimal performance
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
Industrial Usage of FFKM in Vacuum & Low Outgassing Applications
FFKM O-rings, gaskets, custom parts, and tubes are essential in industries where vacuum integrity, cleanliness, and low contamination are critical. Canrez® FFKM vacuum-grade materials provide reliable sealing performance, reduced contamination risk, and improved system efficiency, making them a preferred solution for demanding vacuum applications. Canyon Components partners with customers to ensure proper material selection and sealing design.
Have questions about vacuum-grade FFKM solutions? Canyon Components can help you select the right Canrez® FFKM O-rings, gaskets, custom parts, and tubes, engineered for low outgassing, high purity, and reliable vacuum sealing performance.
Semiconductor Industry
Used in FFKM O-rings, gaskets, and custom parts for vacuum chambers, etching systems, and deposition equipment, where low outgassing and chemical resistance are critical
Aerospace & Space Systems
Applies FFKM O-rings, gaskets, and custom parts in vacuum environments and space applications, where material stability and low volatility are essential
Analytical & Laboratory Equipment
Utilizes FFKM O-rings, gaskets, and custom parts in mass spectrometers, vacuum pumps, and analytical systems, ensuring contamination-free operation
High-Purity Manufacturing
Employs FFKM O-rings, gaskets, and custom parts in cleanroom and high-purity environments, where low extractables are required
Industrial Vacuum Systems
Used in FFKM O-rings, gaskets, and custom parts for vacuum chambers, sealing interfaces, and process equipment, ensuring long-term sealing performance
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
All Other FFKM Types Available
Canrez® FFKM O-Rings & Custom Parts
Canyon Components supplies Canrez® FFKM O-rings, equivalent to Kalrez®, Chemraz®, and Parker® O-rings, in AS568, JIS, and Metric sizes. These perfluoroelastomer O-rings provide exceptional chemical resistance, high-temperature stability, and long-term sealing performance for semiconductor, pharmaceutical, and chemical processing applications. Custom molded Canrez® parts available.
Kalrez® vs Canrez®: Comparing FFKM Sealing Solutions"
Compare Kalrez® vs Canrez® FFKM for O-rings, gaskets, and custom parts. Learn the differences in performance, availability, and cost to choose the best perfluoroelastomer for your application.
Kalrez FFKM O-Rings, Gaskets & Custom Parts
Canyon Components supplies genuine Kalrez® FFKM O-rings, gaskets, and custom molded parts with exceptional chemical resistance and high-temperature performance. Available in AS568, Metric, and custom sizes, with Canrez®, Chemraz®, and Parker® O-ring equivalents for semiconductor, pharmaceutical, aerospace, and chemical processing applications.
Parker Hannifin Parofluor FFKM O-Rings, Gaskets & Custom Parts
Canyon Components supplies genuine Parker Hannifin Parofluor FFKM materials for extreme chemical resistance and high temperature sealing. Compare Parofluor with Canrez® FFKM for O-rings, gaskets, and custom parts in demanding applications.
Chemraz FFKM O-Rings, Gaskets & Custom Parts
Canyon Components supplies Chemraz® FFKM O-rings engineered for the most demanding sealing applications. Known for extreme chemical resistance and high-temperature stability, Chemraz® O-rings provide reliable sealing in semiconductor, pharmaceutical, aerospace, and chemical processing environments. Alternatives include Kalrez®, Canrez®, and Parker® FFKM O-rings in AS568, Metric, and custom sizes.
Simriz® FFKM from Freudenberg: O-Rings, Gaskets, and Custom Parts
Canyon Components is a distributor of Simriz® FFKM O-rings designed for extreme chemical resistance and high temperature applications. Compare Simriz® with Canrez® FFKM for O-rings, gaskets, and custom parts in demanding sealing environments.
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