Silicone O-Rings and Gaskets for the Semiconductor Industry
Silicone materials for the semiconductor industry are engineered for sealing applications requiring high purity performance, low outgassing, broad temperature stability, and compatibility with sensitive electronic manufacturing environments. Silicone elastomers are widely used in O-rings, gaskets, diaphragms, vacuum seals, environmental seals, tubing seals, and custom molded rubber parts installed in semiconductor manufacturing equipment, wafer processing systems, vacuum chambers, chemical delivery systems, and clean room environments. These materials are commonly specified in semiconductor applications due to their flexibility, thermal stability, and environmental resistance.
Canyon Components supplies high quality Silicone sealing solutions for semiconductor manufacturing applications including clean room manufactured compounds, low outgassing materials, and high purity Silicone components. Our team supports semiconductor O-rings, gaskets, vacuum seals, and custom molded sealing systems used throughout wafer fabrication, chip manufacturing, electronics production, and high purity process systems. We also provide specialty materials for plasma environments, low particle generation applications, and sensitive semiconductor manufacturing systems.
Common names include: Semiconductor grade Silicone, VMQ, high purity Silicone, low outgassing Silicone
Trade names include: Silicone, VMQ, platinum cured Silicone
Canyon Components supplies high-performance silicone PVMQ and VMQ O-rings engineered for reliable sealing in medical, food-grade, and high-temperature applications.
Silicone Materials Available
This table shows many of our standard materials and links out to our O-ring store. Get in touch with us if you need a custom gasket, custom molded part, or non-standard geometry!
Filter by
Temperature Search (°C)
Durometer
Material Brand
Size Search
___X____
Features of Silicone for the Semiconductor Industry
- These materials are commonly used in vacuum systems, wafer processing equipment, environmental seals, and semiconductor manufacturing systems
- Silicone compounds offer excellent resistance to ozone, UV exposure, and environmental aging
- High purity Silicone compounds are available for clean room and contamination sensitive semiconductor applications
- Platinum cured Silicone compounds provide cleaner processing characteristics and lower extractables
- Silicone compounds are available in translucent, clear, white, and custom colors depending on semiconductor application requirements
Limitations of Silicone for the Semiconductor Industry
- Silicone compounds generally provide lower abrasion resistance and tear resistance compared to some industrial elastomers
- These materials may not perform well in aggressive dynamic sealing systems involving severe wear conditions
- Standard Silicone materials may not provide sufficient resistance to aggressive semiconductor chemicals or plasma exposure
- Silicone compounds typically have lower tensile strength compared to many industrial elastomers
- Certain aggressive semiconductor chemistries may require FFKM or specialty perfluoroelastomer compounds instead
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
Semiconductor Industry Applications for Silicone Materials
Silicone elastomers are widely used in semiconductor manufacturing systems where cleanliness, flexibility, environmental resistance, and thermal stability are essential. These materials are commonly installed in wafer fabrication systems, vacuum chambers, fluid transfer systems, semiconductor processing tools, environmental sealing systems, and electronics manufacturing equipment. Material selection depends on operating temperature, plasma exposure, vacuum conditions, chemical compatibility, and contamination control requirements.
Vacuum Chamber Sealing
Silicone O-rings and vacuum gaskets are commonly used in semiconductor vacuum systems and environmental sealing applications.
Wafer Processing Equipment
Semiconductor processing tools frequently use high purity Silicone seals exposed to thermal cycling and controlled environments.
Clean Room Manufacturing Systems
Silicone sealing materials are commonly manufactured and packaged in clean room environments for contamination sensitive semiconductor applications.
Fluid Transfer and Chemical Delivery Systems
Semiconductor systems frequently use Silicone tubing seals and fluid handling components for high purity process systems.
Electronics Manufacturing Equipment
Environmental sealing systems for electronics manufacturing commonly utilize Silicone O-rings and custom molded seals.
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
All Other Silicone Types Available
Silicone PVMQ & VMQ O-Rings & Custom Parts | Flexible High-Performance
Canyon Components supplies silicone O-rings and custom parts made from VMQ and PVMQ for high-performance sealing in medical, aerospace, food-grade, and industrial applications. Silicone O-rings offer excellent flexibility, temperature resistance, and biocompatibility for critical environments.
Silicone O-ring High Temperature | Heat-Resistant, Flexible Elastomer
Canyon Components offers high temperature silicone O-rings and custom parts designed to withstand continuous exposure up to 600°F. Ideal for aerospace, automotive, food-grade, and industrial sealing where thermal stability and long-term reliability are critical.
Silicone O-Ring Low Temperature PVMQ | Flexible, Cold-Resistant O-ring
Canyon Components supplies low temperature PVMQ silicone O-rings and custom parts engineered for extreme cold, maintaining sealing flexibility down to -112°F. Ideal for aerospace, cryogenic, and industrial applications requiring durable, cold-resistant silicone performance.
Silicone O-Ring Platinum Cured
Canyon Components provides platinum cured silicone O-rings and custom parts designed for medical, pharmaceutical, food-grade, and high-purity sealing applications. These O-rings offer superior biocompatibility, thermal resistance, and low-extractable performance for critical environments.
Liquid Silicone Rubber (LSR) O-Rings | Precision Custom Rubber Parts
Canyon Components supplies liquid silicone rubber (LSR) O-rings and custom rubber parts manufactured for precision, durability, and versatility. Ideal for medical, automotive, and consumer applications, LSR offers biocompatibility, flexibility, and high-performance sealing. Available in Kalrez®, Canrez®, Chemraz®, Parker®, FFKM, FKM, EPDM, silicone, and NBR materials. Oring, O'ring, O ring
Back to Elastomers Hub
