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Semiconductor & Solar Grade O-ring Materials

In the high-tech industries of semiconductor manufacturing and solar energy production, the quality of materials is paramount. Semiconductor and solar grade materials are meticulously engineered to meet the rigorous demands of these industries. In this web page, we will explore the significance of semiconductor and solar grade materials, common application considerations, and discuss the different types available.


With Canyon Components, you can be sure that high quality materials that meet you needs are always readily available. Custom & standard Semiconductor & Solar Grade Materials available now!


Check with one of Canyon’s helpful product engineers for an expert material and manufacturing recommendation.

Semiconductor & Solar Grade O-ring Materials

FFKM Semiconductor & Solar Materials Available

Thousands of Semiconductor & Solar Grade FFKM Materials are available now with Canyon Components! From CanRez™, to Kalrez®, to Chemraz®, we can meet your Semiconductor sealing requirements! Some common Semiconductor & Solar Grade Materials include the following.

Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.

Semiconductor & Solar Materials Available

Thousands of Semiconductor & Solar Grade Materials are available now with Canyon Components! Some common Semiconductor & Solar Grade Materials include the following.

COMPOUND BASIC FEATURES DETAILS
Canyon™ Material Shore A Temperature Description Comparable Materials
CP75BK01 CanRez™ FFKM: Black 75 -15°C to +320°C
(5°F to +608°F)
• Most Popular Compound
• High Temperature Performance
• Strong Acid Resistance
• Good for Wet Semicon Applications
Kalrez® 4079, 6375, 7075
CP75BK03 CanRez™ FFKM: Black 75 -15°C to +260°C
(5°F to +500°F)
• High Temperature Steam Resistance
• High Temperature Amine Resistance
• Strong Acid Resistance
• Good for Wet Semicon Applications
Kalrez® 6375, 6380, 1050LF
Chemraz® 605
CP75BK31 CanRez™ FFKM: Black 75 -15°C to +335°C
(5°F to +635°F)
• Ultra-High Temperature Performance
• Capable of Excursions to 350°C
• Strong Acid Resistance
• Good for Plasma Applications
Kalrez® 4079, 8900, 7075
CP60TA11 CanRez™ FFKM: Translucent Amber 60 -15°C to +280°C
(5°F to +536°F)
• High Purity Material, Translucent Amber
• Ultra Low Particulate
• Good for Wet Semicon Applications
• Exceptional Plasma Resistance
Kalrez® 8002
CP70TA11 CanRez™ FFKM: Translucent Amber 70 -15°C to +280°C
(5°F to +536°F)
• High Purity Material, Translucent Amber
• Ultra Low Particulate
• Good for Wet Semicon Applications
• Exceptional Plasma Resistance
Kalrez® 6221 LS205
Chemraz® 625
CP75WH12 CanRez™ FFKM: White 75 -15°C to +250°C
(5°F to +482°F)
• General Purpose White FFKM
• Good Plasma Resistance
• Carbon Black Free
• Low Cost, Available in Unlimited Sizes
Chemraz® 513
CP80WH01 CanRez™ FFKM: White 80 -30°C to +315°C
(-22°F to +600°F)
• High Low Temperature Performance
• Ultra Low Particulate
• Clean Room Manufactured Packaged
• Exceptional Plasma Resistance
Kalrez® 8575 9500
Chemraz® 513
Parofluor® FF352-75
CP90WH20 CanRez™ FFKM: White 90 -15°C to +240°C
(5°F to +464°F)
• High Durometer Material
• Ultra Low Particulate
• Carbon Black Free
• Exceptional Plasma Resistance
Chemraz® 520
Chemraz® 513 FFKM: White 80 -30°C to +210°C
(-22°F to +410°F)
• Chemraz® 513 FFKM
• Low Temperature
• For Semiconductor
CanRez™ CP80WH01, CP75WH12
Kalrez® 0040 FFKM: Black 70 -42°C to +220°C
(-44°F to +428°F)
• Kalrez® 0040 FFKM
• Ultra Low Temperature
• Extreme Chemical Performance
CanRez™ CP75BK91
Kalrez® 8575 FFKM: White 65 -12°C to +300°C
(10°F to +572°F)
• Kalrez® 8575 FFKM
• High Temperature
• Extreme Chemical Resistance
• For Semiconductor Applications
CanRez™ CP60TA11, CP70TA11, CP80WH01
Kalrez® 9100 FFKM: Translucent Amber 70 -12°C to +300°C
(10°F to +572°F)
• Kalrez® 9100 FFKM
• High Temperature
• Extreme Chemical Resistance
• Semi-Translucent For Semiconductor Applications
CanRez™ CP60TA11, CP70TA11, CP80WH01
VT75BK00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton Parker® V0747-75, V1164-75, V1475-75, V1476-75
VT75BR00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton Parker® V1476-75, V884-75
VT75GR00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton
VT75WH00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
White, general purpose FKM Viton
PU70TY01 Polyurethane (PU) 70 -55°C to +125°C
(-67°F to +257°F)
Translucent thermoplastics high performance
PT55WH00 Virgin PTFE N/A -212°C to +287°C
(-350°F to +550°F)
Virgin PTFE high performance
TF75BK00 FEP Encapsulated FKM N/A -26°C to +204°C
(-15°F to +400°F)
General purpose FEP encapsulated Viton
TS75OR00 FEP Encapsulated Silicone N/A -62°C to +204°C
(-80°F to +400°F)
Low temperature FEP encapsulated Silicone
TS75OR01 FEP Encapsulated Hollow Silicone N/A -62°C to +204°C
(-80°F to +400°F)
Low temperature FEP encapsulated hollow Silicone for improved flexibility
TM00TR00 FEP Encapsulated Steel Spring N/A -251°C to +204°C
(-420°F to +400°F)
Ultra low temperature FEP encapsulated Steel Spring
SI70TR00 Silicone (VMQ) 70 -55°C to +205°C
(-67°F to +401°F)
Transluscent, good clarity Silicone
SI70WH22 Silicone (VMQ) 70 -55°C to +315°C
(-67°F to +600°F)
High Temperature, white Silicone
SI80TR00 Silicone (VMQ) 80 -60°C to +205°C
(-76°F to +401°F)
Transluscent, good clarity Silicone
SI80TR06 Silicone (VMQ) 80 -55°C to +205°C
(-67°F to +401°F)
Platinum Cured, transluscent, high clarity Silicone. Clean Room Manufactured, FDA Compliant, USP Class VI

Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.

What are Semiconductor and Solar Grade Materials?

  • Semiconductor and solar grade materials are substances, components, or equipment that are specially designed and manufactured to meet the strict purity and precision requirements of the semiconductor and solar industries. These materials play a critical role in the performance and reliability of semiconductor devices and solar panels.


Common Considerations
  • Sealing Applications: O-rings, gaskets, & custom molded parts are used in a variety of sealing applications within semiconductor processing equipment. O-rings, gaskets, & custom molded parts can be found in vacuum chambers, wafer processing equipment, gas distribution systems, chemical handling systems, and many other areas where a reliable seal is required.


  • Material Selection: The choice of O-ring, gasket, & custom molded part material is crucial in semiconductor processing due to the unique challenges posed by the environment. O-ring, gasket, & custom molded part materials with excellent chemical resistance, low outgassing properties, and high purity are preferred. Common materials used include perfluoroelastomers (e.g., Canrez, Kalrez), fluorocarbon elastomers (e.g., Viton), and certain types of silicone. All of these materials can be used to produce O-rings, gaskets, & custom molded parts.


  • Vacuum Compatibility: Semiconductor processing often involves vacuum environments, and O-rings, gaskets, & custom molded parts must be compatible with such conditions. Special attention is given to the outgassing characteristics of the O-ring, gasket, & custom molded part material to minimize contamination and maintain the vacuum integrity.


  • ​Chemical Resistance: Semiconductor processing involves the use of various chemicals, gases, and solvents. O-rings, gaskets, & custom molded parts must be resistant to these substances to ensure they do not degrade or react with the process media, which could lead to leaks or contamination.

Further Considerations

  • Temperature and Pressure: Semiconductor processes may involve extreme temperatures and pressures. O-rings, gaskets, & custom molded parts must be capable of withstanding these conditions without losing their sealing properties or undergoing deformation.


  • Size and Tolerance Control: Semiconductor equipment often requires precision-engineered components, and O-rings, gaskets, & custom molded parts are no exception. Tight size tolerances are crucial to ensure a proper fit and seal. Custom-sized O-rings, gaskets, & custom molded parts may be required for specific applications.


  • Installation and Maintenance: Proper installation and regular maintenance of O-rings, gaskets, & custom molded parts are important for their optimal performance and longevity. Regular inspections and replacements of these O-rings, gaskets, & custom molded parts are necessary to prevent leaks and maintain equipment reliability.


  • Contamination Control: Semiconductor processes demand high levels of cleanliness and contamination control. O-rings, gaskets, & custom molded parts should be designed and manufactured to minimize particulate generation and shedding, preventing contamination of the process materials or equipment.

Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.

Semiconductor & Solar Materials Available

Click here to see some of our most commonly served industries!

Each of these materials has its own advantages, limitations, and cost implications. The choice of material usually depends on factors like chemical compatibility, temperature, pressure, dynamic or static use, and specification requirements.


Canyon Components strives to meet all customer service requests. Feel free to contact Canyon Components engineering and let our knowledgeable staff help you design the perfect part for your needs.

Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.

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* Disclaimer: Kalrez® is a registered trademark of DuPont™. It represents a high-performance perfluoroelastomer used in demanding sealing applications. Please note that the Kalrez® brand is not owned by Canyon Components. All rights and ownership of the Kalrez® trademark are held by DuPont™, ensuring the quality and reliability associated with this renowned brand.
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Canyon Components offers fast & easy online shopping for almost any specialty component. FFKM elastomers like CanRez®, Kalrez®, & Chemraz®, Viton® Extreme & more.

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Email: sales@canyoncomponents.com

Phone: (505) 225-2487

COMPOUND BASIC FEATURES COMPARABLE MATERIALS
Canyon™ Material Shore A Temperature Description Parker®
VT75BK00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton V0747-75, V1164-75, V1475-75, V1476-75
VT75BR00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton V1476-75 V884-75
VT75GR00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
General purpose FKM Viton
VT75WH00 FKM (Viton) 75 -26°C to +225°C
(-15°F to +437°F)
White, general purpose FKM Viton
PU70TY01 Polyurethane (PU) 70 -55°C to +125°C
(-67°F to +257°F)
Translucent thermoplastics high performance
PT55WH00 Virgin PTFE N/A -212°C to +287°C
(-350°F to +550°F)
Virgin PTFE high performance
TF75BK00 FEP Encapsulated FKM N/A -26°C to +204°C
(-15°F to +400°F)
General purpose FEP encapsulated Viton
TS75OR00 FEP Encapsulated Silicone N/A -62°C to +204°C
(-80°F to +400°F)
Low temperature FEP encapsulated Silicone
TS75OR01 FEP Encapsulated Hollow Silicone N/A -62°C to +204°C
(-80°F to +400°F)
Low temperature FEP encapsulated hollow Silicone for improved flexibility
TM00TR00 FEP Encapsulated Steel Spring N/A -251°C to +204°C
(-420°F to +400°F)
Ultra low temperature FEP encapsulated Steel Spring
SI70TR00 Silicone (VMQ) 70 -55°C to +205°C
(-67°F to +401°F)
Transluscent, good clarity Silicone
SI70WH22 Silicone (VMQ) 70 -55°C to +315°C
(-67°F to +600°F)
High Temperature, white Silicone
SI80TR00 Silicone (VMQ) 80 -60°C to +205°C
(-76°F to +401°F)
Transluscent, good clarity Silicone
SI80TR06 Silicone (VMQ) 80 -55°C to +205°C
(-67°F to +401°F)
Platinum Cured, transluscent, high clarity Silicone. Clean Room Manufactured, FDA Compliant, USP Class VI