Viton™ for the Semiconductor Industry
Viton™ (FKM) fluorocarbon elastomers are widely used in the semiconductor manufacturing industry for producing O-rings, gaskets, seals, and custom molded parts that must withstand aggressive process chemicals, elevated temperatures, plasma exposure, and ultra-clean operating environments. Semiconductor fabrication tools place extreme demands on sealing materials due to exposure to acids, solvents, oxidizers, high vacuum, and frequent maintenance cycles.
Viton™ O-rings, gaskets, and custom molded parts offer excellent resistance to hydrocarbons, many solvents, and elevated temperatures commonly encountered in semiconductor equipment such as etch tools, deposition systems, vacuum chambers, pumps, and gas delivery systems. When properly specified, Viton™ materials provide reliable sealing performance in applications where chemical resistance and mechanical durability are required without compromising system uptime.
The engineers and consultants at Canyon Components work closely with semiconductor OEMs and fabs to ensure Viton™ is used appropriately within ultra-clean environments. Contact our expert staff for assistance selecting Viton™ O-rings, gaskets, and custom molded parts for semiconductor applications.
Common names include: FKM (Fluorocarbon), Fluorocarbon Rubber
Trade names include: Viton™, Fluorel®, Technoflon®, Dai-El®
Features of Viton™ in Semiconductor Applications
- Viton™ O-rings, gaskets, and custom molded parts provide excellent resistance to many solvents and process chemicals
- Viton™ materials maintain mechanical integrity at elevated operating temperatures
- Viton™ O-rings and gaskets offer low compression set for stable sealing during vacuum cycling
- Viton™ materials exhibit good resistance to ozone, weathering, and aging
- Viton™ compounds are available in low outgassing formulations suitable for vacuum environments
- Viton™ materials are available in high-durometer grades for improved extrusion resistance
Limitations of Viton™ in Semiconductor Service
- Viton™ O-rings, gaskets, and custom molded parts are not resistant to strong oxidizers such as ozone, fluorine, or certain plasma chemistries
- Viton™ materials have limited resistance to hot water and superheated steam
- Viton™ compounds may not be suitable for prolonged exposure to aggressive acids such as nitric or chromic acid
- Viton™ service temperature range varies by compound, with a typical maximum of 437°F (225°C)
- Certain semiconductor processes require FFKM or PTFE instead of FKM
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
FKM & Viton™ High Performance Polymer Types
There are many types of FKM Polymer Types that Canyon Components offers.
This includes FKM Types A, B, F, GLT, GFLT, XLT, ULT, ETP, & TBR.
The table below is a Viton™ selection guide that lays out the pluses and minuses of each variation.
Key: 1 = Excellent 2 = Good 3 = Poor 4 = Not Recommended
| Types of FKM | A | GF | GLT | GLT ED | GFLT | XLT | ETP | |||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Canyon Compound Number | VT75BK00 | VT75BK20 | VT75BK30 | VT90BK31 | VT75BK40 | VT75BK50 | VT75BK60 | |||||||
| Description | General Purpose | General Purpose High Fluorine |
Low Temp | Low Temp Resistant to Explosive Decompression |
Low Temp High Fluorine |
Extreme Low Temp High Fluorine |
Viton® Extreme High Fluorine FEPM |
|||||||
| Cure Type | Bisphenol | Peroxide | Peroxide | Peroxide | Peroxide | Peroxide | Peroxide | |||||||
| Typical Fluorine Content | 66 | 69.5 | 64 | 64 | 66.5 | 66.5 | 67 | |||||||
| Typical High Temp Range °F (°C) | 437 (225) | 437 (225) | 437 (225) | 437 (225) | 437 (225) | 437 (225) | 437 (225) | |||||||
| Typical Low Temp Range °F (°C) | -15 (-26) | -15 (-26) | -40 (-40) | -40 (-40) | -35 (-37) | -54 (-48) | -6 (-21) | |||||||
| TR-10 °F (°C) | 1 (-17) | -6 (-21) | -22 (-30) | -22 (-30) | -11 (-24) | -40 (-40) | 12 (-11) | |||||||
| Oxygenated Automotive Fuels (containing MeOH, EtOH, MTBE, etc.) | 4 | 1 | 4 | 4 | 1 | 1 | 1 | |||||||
| Reciprocating Engine Lubricating Oils (SE-SF Grades) | 2 | 1 | 1 | 1 | 1 | 1 | 1 | |||||||
| Aliphatic Hydrocarbon Process Fluids,Chemicals | 1 | 1 | 1 | 1 | 1 | 1 | 1 | |||||||
| Aromatic Hydrocarbon Process Fluids, | 1 | 1 | 2 | 2 | 1 | 1 | 1 | |||||||
| Aqueous Fluids: Water, Steam, Mineral Acids (H2SO4, HNO3, HCl, etc.) | 3 | 1 | 1 | 1 | 1 | 1 | 1 | |||||||
| Amines, High pH Caustics | 4 | 4 | 4 | 4 | 4 | 4 | 1 |
FKM (Viton™) Materials Available for Semiconductor Manufacturing Service
This table shows many of our standard materials and links out to our O-ring store. Get in touch with us if you need a custom gasket, custom molded part, or non-standard geometry!
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Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
What Are Semiconductor-Grade Elastomer Materials?
Semiconductor-grade elastomer materials are sealing compounds specifically engineered to meet the purity, cleanliness, and chemical compatibility requirements of semiconductor fabrication and processing equipment. These materials must minimize contamination, withstand aggressive chemistries, and maintain sealing integrity under vacuum and thermal cycling.
Common Considerations for Semiconductor Elastomers
- Purity and Cleanliness: Materials must exhibit low extractables, leachables, and ionic contamination
- Low Outgassing: Elastomers must perform in high-vacuum environments without releasing volatiles
- Chemical Compatibility: Resistance to solvents, acids, bases, and process gases
- Thermal Stability: Ability to withstand elevated tool temperatures and bake-out cycles
- Plasma Resistance: Compatibility with plasma-based processes where applicable
- Traceability: Full batch traceability and material control for fab qualification
Key Standards in the Semiconductor Industry
- SEMI Standards (SEMI F, S, and C Series): SEMI standards define cleanliness, material compatibility, and safety requirements for semiconductor manufacturing equipment. Viton™ compounds may be evaluated against SEMI guidelines for equipment-level sealing applications.
- Low Outgassing and Cleanroom Protocols: Elastomers used in semiconductor tools are often processed, cleaned, and packaged in controlled environments to meet cleanroom requirements and minimize particulate contamination.
- Vacuum Compatibility Requirements: Materials must demonstrate stable performance under high vacuum, repeated pump-down cycles, and thermal excursions.
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
Semiconductor & Solar
Vacuum Baking & Cleaning
Explore our specialized services: vacuum baking for material degassing, ultrasonic cleaning for precision parts, and custom bagging for product protection. Request a quote today!
Clean Room Manufactured Materials
Discover clean room manufactured material features, applications, and how they meet strict cleanliness standards in medical, pharmaceutical, and semiconductor environments.
Semiconductor Manufacturing Elastomer Materials Available
Click here to see some of our most commonly served industries!
Canyon Components supports semiconductor manufacturers with material selection, cleanroom packaging, compound qualification, and custom sealing solutions designed to meet the most demanding fab environments. Whether your application requires Viton™ for general chemical resistance or an alternative elastomer for plasma or oxidizer exposure, our engineering team is ready to help.
Canyon Components strives to meet all customer service requests. Feel free to contact Canyon Components engineering and let our knowledgeable staff help you design the perfect part for your needs.
Canrez® FFKM Perfluoroelastomer
FFKM O-rings, gaskets, and custom molded parts are the gold standard for semiconductor applications involving extreme chemicals, plasma exposure, and ultra-clean environments. They provide exceptional resistance to acids, bases, oxidizers, and high temperatures where traditional FKM materials may fail.
Fluorosilicone (FVMQ)
Fluorosilicone elastomers are used in specialized semiconductor applications requiring low-temperature flexibility combined with resistance to fuels and select solvents. Chemical resistance is more limited compared to FKM and FFKM materials.
Silicone (VMQ, PVMQ)
High-purity silicone elastomers are used in limited semiconductor applications requiring flexibility and cleanliness. However, chemical sensitivity and plasma exposure restrictions typically limit broader use.
EPDM (Ethylene Propylene)
Specialty EPDM compounds are used in semiconductor applications involving DI water, steam, ozone, or certain oxidizing environments where fluorocarbon materials may be less suitable.
Polyurethane (PU, AU)
Polyurethane O-rings, gaskets, and custom molded parts are used in select semiconductor equipment requiring high abrasion resistance and mechanical durability, particularly in dynamic components where chemical exposure is controlled.
PTFE Encapsulated
FEP and PFA encapsulated O-rings consist of an elastomeric core and a seamlessly closed casing of modified PTFE. The elastomer core of encapsulated O-rings is typically made of FKM (Viton) or VMQ (silicone) and guarantees a uniform pre-tensioning at the sealing point.
Spring Energized Seal (SES)
PTFE seals and gaskets offer outstanding chemical inertness, ultra-low outgassing, and high purity performance. Modified PTFE grades improve creep resistance and dimensional stability in static sealing, wafer handling, and vacuum applications.
Please consult a Canyon Components Engineer about your specific application and we will use our decades of experience to formulate a solution that fits your need.
All Other FKM (Viton™) Types Available
Viton™ Type A – General Purpose FKM
Viton™ Type A FKM O-rings, gaskets, and custom molded parts provide balanced heat and chemical resistance. This general purpose fluorocarbon elastomer is widely used in industrial sealing applications involving fuels, oils, and hydrocarbons.
Viton™ Type B – Improved Chemical Resistance FKM
Viton™ Type B FKM offers enhanced resistance to aggressive fuels, aromatics, and chemical blends compared to Type A. This high-fluorine fluorocarbon elastomer is commonly specified in demanding fuel systems.
Viton™ Type F – Improved Chemical Resistance FKM
Viton™ Type F FKM provides superior resistance to oxygenated fuels, solvents, and aggressive chemical environments. This fluorocarbon elastomer is frequently used in automotive and industrial fuel sealing applications.
Viton™ Type GF – High Fluorine FKM
Viton™ Type GF FKM features increased fluorine content for improved resistance to fuels, biodiesel, and harsh chemicals while maintaining strong mechanical properties and sealing reliability.
Viton™ Type GLT – Low Temperature FKM
Viton™ Type GLT FKM delivers improved low-temperature flexibility compared to standard fluorocarbon elastomers, supporting sealing performance in colder climates without sacrificing chemical resistance.
Viton™ Type GFLT – Low Temperature and Chemical Resistant FKM
Viton™ Type GFLT FKM combines enhanced low-temperature flexibility with improved resistance to aggressive fuels and chemical blends, making it suitable for demanding fluorocarbon sealing applications.
Viton™ Type ETP – Specialty Chemical Resistant FKM
Viton™ Type ETP FKM provides exceptional resistance to aggressive chemicals, steam, and amines. This specialty fluorocarbon elastomer is often used in oil, gas, and chemical processing systems.
Viton™ Type ULT – Ultra Low Temperature FKM
Viton™ Type ULT FKM is engineered for ultra-low temperature environments while maintaining fluorocarbon chemical resistance, making it suitable for extreme cold industrial and aerospace sealing systems.
Viton™ Type XLT – Extreme Low Temperature FKM
Viton™ Type XLT FKM extends low-temperature sealing capability beyond GLT grades, offering reliable fluorocarbon elastomer performance in severe cold and aerospace environments.
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